微奈米工程導論
Introduction to Micro/Nanotechnology
| 節 | 週六 |
|---|---|
5 13:20–14:10 | 微奈米工程導論 EE205（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
學習微奈米級製程與量測、微奈米級物理感測器與致動器以及包含對應上述各項技術之專題實驗. Learning Micro/Nanoscale Fabrication and Characterization, Micro/Nanoscale Sensors and Actuators (including corresponding hand-on experiments).
普通物理 College Physics
無備註
TAs: Yu-En Tsai (蔡育恩), Ext 55194, azey40904.me04@nctu.edu.tw Shao-Wei Hsu (徐紹維), Ext 55194, karta3060077.me04@nctu.edu.tw
60 points- 6 Hand-On Experiments 20 points- 1st Exam 15 points- 2nd Exam 5 points- Class Attendance
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction |
| 第 2 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 5 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Micro Characterization: Optimal Microscope, Profilo-meter, Scanning Electron Microscope |
| 第 6 週 | (Hand-On Experiment 1) Micro/Nano-Fabrication and Characterization |
| 第 7 週 | (Hand-On Experiment 2) Micro Fabrication and Characterization |
| 第 8 週 | (Hand-On Experiment 3) Micro/Nano-Fabrication and Characterization |
| 第 9 週 | (Hand-On Experiment 4) Micro/Nano-Fabrication and Characterization |
| 第 10 週 | 1st Exam |
| 第 11 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc. Nano Characterization: Scanning Electron Microscope, Scanning Probe Microscope. |
| 第 12 週 | (Hand-On Experiment 5) Nano Fabrication and Characterization |
| 第 13 週 | (Lecture) Micro/Nano Sensors |
| 第 14 週 | (Lecture) Micro/Nano Sensors & Energy Harvesters |
| 第 15 週 | {Lecture} Micro/Nano Actuators |
| 第 16 週 | {Lecture} Micro/Nano Actuators & Emerging/New Topics |
| 第 17 週 | (Hand-On Experiment 6) Micro/Nano Sensors & Actuators |
| 第 18 週 | 2nd Exam |
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nctu.edu.tw