表面分析技術

教師未提供此項資料

Must: 普通物理 (general physics),普通化學(general chemistry)。 Suggested: 量子力學 (quantumn mechanics),物理化學 (physical chemistry),半導體物理與製程 (semiconductor physics and manufacturing)

無備註

PPT slide presentation in English. Lecture notes are provided.

The average of the midterm and the final examinations occupies 85% of the final academic score. The rest (15%) depends on your class performance.

• Surface structure analysis

  Secondary electron microscopy (SEM)

  講授：

  4

• Electron spectroscopy

  Auger electron microscopy

  講授：

  7

• Electron spectroscopy

  X-ray photoelectron spectroscopy (XPS or ESCA) Ultra-violet photoelectron spectroscopy (UPS)

  講授：

  8

• Ion spectroscopy

  Secondary ion mass spectroscopy (SIMS)

  講授：

  6

• Ion spectroscopy

  Ion scattering spectroscopy

  講授：

  5

• Vacuum technology

  Vacuum pumps Vacuum gauges

  講授：

  4

• Surface structure analysis

  Scanning tunneling microscopy (STM) Atomic force microscopy (AFM)

  講授：

  6

• Suface structure analysis - Surface diffraction

  Low energy electron diffraction (LEED)

  講授：

  2

• Vibrational spectroscopy

  Electron energy loss spectroscopy (EELS) Reflection absorption infrared spectroscopy (RAIR) Raman spectroscopy

  講授：

  2

• Thermal desorption

  Thermal desorption spectroscopy (TDS)

  講授：

  2

• Introduction to surface analyses

  講授：

  2

Recommended: Surface Analysis – The Principle Techniques", John C. Vickerman, John Wiley & Sons (1997).

地點

EF322

時間

By appointment.

聯絡方式

Office Tel: 5131322 E-mail: fmpan@faculty.nctu.edu.tw