微電子積體電路製程
VLSI Manufacture Technology
| 節 | 週三 |
|---|---|
A 18:30–19:20 | 微電子積體電路製程 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
This course provides a fundamental insight into the manufacturing technology of semiconductor devices and integrated circuits.
Fundamental physics, chemistry, and mathematics
無備註
Textbook is downloadable via sources such as Knovel. Handouts will be given in the beginning of the semester.
Assignments and presentation: 30% Midterm exam (open book) 30% Final exam (open book) 40% *All assignments and exams are carried out online.
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | School holiday 2/16 |
| 第 2 週 | Introduction 2/23 |
| 第 3 週 | Semiconductor Basics 3/2 |
| 第 4 週 | Wafer Manufacturing, Epitaxy, and Substrate Engineering 3/9 |
| 第 5 週 | Thermal Process 3/16 |
| 第 6 週 | Photolithography 3/23 |
| 第 7 週 | Plasma Basics 3/30 |
| 第 8 週 | Midterm Exam 4/6 |
| 第 9 週 | Ion Implantation and Etch 4/13 |
| 第 10 週 | Chemical Vapor Deposition and Dielectric Thin Films 4/20 |
| 第 11 週 | Metallization 4/27 |
| 第 12 週 | Chemical Mechanical Polishing 5/4 |
| 第 13 週 | Process Integration 5/11 |
| 第 14 週 | Integrated Circuit Processing Technologies 5/18 |
| 第 15 週 | Presentation 5/25 |
| 第 16 週 | Final Exam 6/1 |
Introduction to Semiconductor Manufacturing Technology (2nd Edition) (Xiao, Hong, SPIE, 2012)
- 地點
- N/A
- 時間
- N/A
- 聯絡方式
- king@nctu.edu.tw