低溫電漿原理與應用

This course is to instruct students with fundamental knowledge of chemical and physical processes of plasma (particularly low-temperature plasma). Plasma definition and generation, atomic collisions, plasma dynamics, particle transport mechanisms, plasma characteristics (both physical and chemical), fundamental plasma equations and equilibrium, and plasma applications & diagnostics will be covered. Students are expected to have profound comprehension of theoretical plasma principles and practical plasma applications.

Fluid Mechanics, Engineering Mathematics.

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Homework: 40% Midterm exam: 30% Final project report: 30%

• Single Charged Particle Motion

• Fundamentals of Plasma Equations and Equilibrium

• Atomic Collisions (Molecular Collision: optional)

• Plasma Dynamics in Weakly Ionized Plasma

• Diffusion and Transport of Plasma

• DC Sheaths

• Particle and Energy Balance in Discharges

• Capacitively Discharges

• Inductively Discharges

• Wave-Heated Discharges

• Plasma Processing and Related Topics

• Plasma Diagnostics with Langmuir Probe

• Introduction to Plasma

Course will taught based on lecture notes while students are encourage to read the reference listed below: 1. Principles of Plasma Discharge and Materials Processing by M.A. Lieberman and A.J. Lichtenberg, John Wiley & Sons, Inc, 1994. 2. Introduction to Plasma Theory by D.R. Nicholson, Krieger Publishing Company, Florida, 1991. 3. Plasma Physics Via Computer Simulation by C.K. Birdsall and A.B. Langdon, McGraw-Hill Book Company, 1985. 4. Non-Equilibrium Air Plasmas at Atmospheric Pressure by K.H. Becker, U. Kogelschatz, K.H. Schoenbach and R.J. Barker, Taylor& Francis, 2004.

地點

EE473

時間

By appointment

聯絡方式

55119