半導體製程技術概論(一)
Introduction to Semiconductor Manufacturing Technology (I)
| 節 | 週二 |
|---|---|
5 13:20–14:10 | 半導體製程技術概論(一) SB522（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
Silicon integrated circuit fabrication technology requires many diverse fields of science and engineering. This course will teach the key fabrication technologies and the scientific foundations that carried microelectronics well into nanotechnology.
Knowledge of semiconductor device physics, solid state physics and principles of electrical engineering, modern physics
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midterm exam 50% final exam 50%
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| 週次 | 主題 |
|---|---|
| 第 0 週 | Crystal Growth and Wafer Engineering |
| 第 0 週 | Introduction/ Invention of the Transistor/ Emergence of Silicon Valley/ Moore’s Law |
| 第 0 週 | Lithography and Pattern Transfer |
| 第 0 週 | Semiconductor Manufacturing, Gettering and Wafer Cleaning |
| 第 0 週 | Thermal Oxidation and the Si/ SiO2 Interface Rapid Thermal Processing |
| 第 0 週 | Thin Film Deposition and Epitaxy |
| 第 0 週 | Modern CMOS Technology |
| 第 8 週 | Etching |
| 第 9 週 | Statistical Process Control and Process Monitoring in Semiconductor Fabrication |
ppt files and handout
- 地點
- B430
- 時間
- every Wednesday and Thursday 2-4 PM
- 聯絡方式
- x56581