微電子積體電路製程
VLSI Manufacture Technology
| 節 | 週三 |
|---|---|
A 18:30–19:20 | 微電子積體電路製程 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
This course provides a fundamental insight into the manufacturing technology of semiconductor devices and integrated circuits.
Fundamental physics, chemistry, and mathematics
無備註
Textbook is downloadable via sources such as Knovel. Handouts will be given in the beginning of the semester.
Assignments and presentation: 30% Midterm exam (open book) 30% Final exam (open book) 40% *All assignments and exams are carried out online.
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction (not school holiday) 2023-02-15(三) |
| 第 2 週 | Semiconductor Basics 2023-02-22(三) |
| 第 3 週 | Semiconductor Basics 2023-03-01(三) |
| 第 4 週 | Wafer Manufacturing, Epitaxy, and Substrate Engineering 2023-03-08(三) |
| 第 5 週 | Thermal Process 2023-03-15(三) |
| 第 6 週 | Photolithography 2023-03-22(三) |
| 第 7 週 | Plasma Basics 2023-03-29(三) |
| 第 8 週 | Midterm Exam 2023-04-05(三) |
| 第 9 週 | Ion Implantation and Etch 2023-04-12(三) |
| 第 10 週 | Chemical Vapor Deposition and Dielectric Thin Films 2023-04-19(三) |
| 第 11 週 | Metallization 2023-04-26(三) |
| 第 12 週 | Chemical Mechanical Polishing 2023-05-03(三) |
| 第 13 週 | Process Integration 2023-05-10(三) |
| 第 14 週 | Integrated Circuit Processing Technologies 2023-05-17(三) |
| 第 15 週 | Presentation 2023-05-24(三) |
| 第 16 週 | Final Exam 2023-05-31(三) |
| 第 17 週 | 2023-06-07(三) |
| 第 18 週 | 2023-06-14(三) |
Introduction to Semiconductor Manufacturing Technology (2nd Edition) (Xiao, Hong, SPIE, 2012)
- 地點
- N/A
- 時間
- N/A
- 聯絡方式
- king@nctu.edu.tw