前瞻CMOS製程整合工程
Advanced CMOS Process Integration Engineering
| 節 | 週五 |
|---|---|
5 13:20–14:10 | 前瞻CMOS製程整合工程 ED202（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
A qualified process integration engineer requires to possess interdisciplinary knowledge across advanced CMOS device physics, semiconductor fabrication process, and basic CMOS device/standard cell/SRAM designs. Yield enhancement and reliability qualification are also important functional areas. The goal of this course is to provide the comprehensive and practical approaches to introduce the aforementioned subjects with sufficient depth for students interested in the process integration engineering (PIE) by lecturers from industry.
Semiconductor Device and Physics (Required); Basic knowledge in CMOS circuits (Preferred)
無備註
上課為保障智慧財產權,不得照相、錄音或錄影。
Mid-Term Exam 50% Final Exam 50%
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| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction 2023-02-17(五) |
| 第 2 週 | Technology Definition, Evolution of CMOS device, and Process Modules Overview 2023-02-24(五) |
| 第 3 週 | Basic Process Introduction (TSMC 林義雄老師) 2023-03-03(五) |
| 第 4 週 | Fabrication processes of advanced CMOS-OD, S/D, Gate 2023-03-10(五) |
| 第 5 週 | Fabrication processes of advanced CMOS-MEOL/BEOL 2023-03-17(五) |
| 第 6 週 | Process defects & yield enhancement (TSMC 林義雄老師) 2023-03-24(五) |
| 第 7 週 | Device Engineering & TCAD(TSMC陳建宏老師) 2023-03-31(五) |
| 第 8 週 | Holiday Week 2023-04-07(五) |
| 第 9 週 | Mid Term Exam 2023-04-14(五) |
| 第 10 週 | Device Engineering & TCAD(TSMC陳建宏老師) 2023-04-21(五) |
| 第 11 週 | Device Engineering & TCAD(TSMC陳建宏老師) 2023-04-28(五) |
| 第 12 週 | Device Engineering & TCAD(TSMC陳建宏老師) 2023-05-05(五) |
| 第 13 週 | Lithography/Patterning Technology(ASML陳俊光老師) 2023-05-12(五) |
| 第 14 週 | Lithography/Patterning Technology(ASML陳俊光老師) 2023-05-19(五) |
| 第 15 週 | Standard cells and SRAM Cells(TSMC林義雄老師) 2023-05-26(五) |
| 第 16 週 | Final Exam 2023-06-02(五) |
| 第 17 週 | Product Development Cycle(TSMC林義雄老師) 2023-06-09(五) |
| 第 18 週 | 2023-06-16(五) |
課程講義
- 地點
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- 時間
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