微奈米工程導論
Introduction to Micro/Nanotechnology
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 微奈米工程導論 EE229（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
主要學習微奈米級的製程與量測技術, 課堂會發給每一位學生一片矽晶圓, 透過邊學習各式微奈米製程原理並邊執行連續製程實作(共6次實作), 最終做出晶片上各種關鍵微奈米結構與簡易元件, 實踐做中學的目標, 最後再學習各式最新之微奈米級物理感測器與致動器(學習更多應用所需之不同元件的不同製程整合方式, 並進行比較之學習). Major Part of the Course: Learn Micro/Nanoscale Fabrication and Characterization Other part of the Course: Learn Micro/Nanoscale Sensors and Actuators (Learn Integration of Different Fabrication-Processes for Devices), Including corresponding hand-on experiments.
普通物理 College Physics
無備註
Teaching Assistant (TA): Major TA: 林洸平 (Ext 55194) Major TA: 施釉薰 (Ext. 55194)
60 points- 6 Hand-On Experiments 20 points- 1st Exam 15 points- 2nd Exam 5 points- Class Attendance
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction 2023-09-11(一) |
| 第 2 週 | {Lecture} Micro Fabrication:Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-09-18(一) |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-09-25(一) |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-10-02(一) |
| 第 5 週 | {Lecture}Micro Fabrication:Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-10-09(一) |
| 第 6 週 | (Hand-On Experiment 1)Micro/Nano-Fabrication and Characterization 2023-10-16(一) |
| 第 7 週 | (Hand-On Experiment 2)Micro Fabrication and Characterization 2023-10-23(一) |
| 第 8 週 | (Hand-On Experiment 3)Micro/Nano-Fabrication and Characterization 2023-10-30(一) |
| 第 9 週 | (Hand-On Experiment 4)Micro/Nano-Fabrication and Characterization 2023-11-06(一) |
| 第 10 週 | 1st Exam 2023-11-13(一) |
| 第 11 週 | {Lecture}Nano Fabrication:E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Nano Characterization:Scanning Electron Microscope, Scanning Probe Microscope. 2023-11-20(一) |
| 第 12 週 | {Lecture}Nano Fabrication:E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Nano Characterization:Scanning Electron Microscope, Scanning Probe Microscope. 2023-11-27(一) |
| 第 13 週 | (Hand-On Experiment 5)Nano Fabrication and Characterization 2023-12-04(一) |
| 第 14 週 | (Lecture)Micro/Nano Sensors, Energy Harvesters, Actuators and Emerging Devices 2023-12-11(一) |
| 第 15 週 | (Hand-On Experiment 6)Micro/Nano Sensors and/or Actuators in Smart Phone Applications 2023-12-18(一) |
| 第 16 週 | 2nd Exam 2023-12-25(一) |
| 第 17 週 | Flexible (set by university): such as extra/make-up class, experiments, and exams 2024-01-01(一) |
| 第 18 週 | Flexible (set by university): such as extra/make-up class, experiments, and exams 2024-01-08(一) |
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nycu.edu.tw