半導體製程技術
Semiconductor Process and Technology
| 節 | 週二 |
|---|---|
7 15:30–16:20 | 半導體製程技術 SC162（光復） 3 節連堂 |
8 16:30–17:20 | |
9 17:30–18:20 |
* 根據陽明交大上課時間表所列
Course content: (1) Introduction to fabrication techniques for MOS-devices, and the electrical performance of devices based on these techniques, (2) fundamental principles of fabrication processes, models for crystal growth, oxidation, diffusion, ion implantation, etching, deposition, and metallization, (3) the implications for device performance caused by material properties and fabrication techniques. Course objectives: To introduce students the processing and theories of semiconductor device fabrication based on current methodologies.
Semiconductor Device and Physics
無備註
教師未提供此項資料
Quiz/ homework 20 % Midterm 40 % Final exam 40 %
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction and basics 2023-09-12(二) |
| 第 2 週 | Cleanroom environment 2023-09-19(二) |
| 第 3 週 | Cleaning technology 2023-09-26(二) |
| 第 4 週 | Wafer manufacturing and epitaxy 2023-10-03(二) |
| 第 5 週 | Holiday 2023-10-10(二) |
| 第 6 週 | Oxidation and thermal processing 2023-10-17(二) |
| 第 7 週 | Implantation 2023-10-24(二) |
| 第 8 週 | Midterm exam 2023-10-31(二) |
| 第 9 週 | Lithography 2023-11-07(二) |
| 第 10 週 | Etching 2023-11-14(二) |
| 第 11 週 | Etching, Deposition 2023-11-21(二) |
| 第 12 週 | Deposition 2023-11-28(二) |
| 第 13 週 | Metallization 2023-12-05(二) |
| 第 14 週 | CMP 2023-12-12(二) |
| 第 15 週 | Process integration 2023-12-19(二) |
| 第 16 週 | Final exam 2023-12-26(二) |
Textbook: Hong Xiao, “Introduction to Semiconductor Manufacturing Technology,” 2nd Ed., SPIE (2012) References: S. M. Sze and M. K. Lee, “Semiconductor Devices Physics and Technology,” 3rd Ed., John Wiley & Sons Inc (2012) M. Quirk and J. Serda, “Semiconductor Manufacturing Technology,” Pearson (2008) J. D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling,” Prentice Hall (2000) Robert F. Pierret, “Semiconductor Device Fundamentals,” Addison Wesley (1996) C. Y. Chang and S. M. Sze, “ULSI Technology,” McGraw Hill (1996)
- 地點
- 教師未提供此項資料
- 時間
- By appointment
- 聯絡方式
- 教師未提供此項資料