微/奈米機電系統之晶片實作
MEMS/NEMS-Chips Laboratory
| 節 | 週四 |
|---|---|
A 18:30–19:20 | 微/奈米機電系統之晶片實作 EE230（光復） 3 節連堂 |
B 19:30–20:20 | |
C 20:30–21:20 |
* 根據陽明交大上課時間表所列
學習微奈米級製程與量測、微奈米級物理感測器與致動器以及包含對應上述各項技術之專題實驗. Learning Micro/Nanoscale Fabrication and Characterization, Micro/Nanoscale Sensors and Actuators (including corresponding hand-on experiments).
普通物理 College Physics
無備註
TAs: 林鉦軒 peter122838.en11@nycu.edu.tw , Ext 55194 黃揚淋 yanglin.en11@nycu.edu.tw, Ext 55194
60 points- 6 Hand-On Experiments 20 points- 1st Exam 15 points- 2nd Exam 5 points- Class Attendance
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction 2023-09-14(四) |
| 第 2 週 | {Lecture} Micro Fabrication:Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-09-21(四) |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-09-28(四) |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Micro Characterization:Optimal Microscope, Profilo-meter, Scanning Electron Microscope 2023-10-05(四) |
| 第 5 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography, CAD-Layout (for e-beam writing path), Film Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Electroplating, Etching, Lift-Off Process, etc.Nano Characterization:Scanning Electron Microscope, Scanning Probe Microscope, 2023-10-12(四) |
| 第 6 週 | (Hand-On Experiment 4)Micro/Nano-Fabrication and Characterization 2023-10-19(四) |
| 第 7 週 | (Hand-On Experiment 1)Micro/Nano-Fabrication and Characterization 2023-10-26(四) |
| 第 8 週 | (Hand-On Experiment 2)Micro/Nano-Fabrication and Characterization 2023-11-02(四) |
| 第 9 週 | (Hand-On Experiment 3)Micro/Nano-Fabrication and Characterization 2023-11-09(四) |
| 第 10 週 | Exam 1 2023-11-16(四) |
| 第 11 週 | (Lecture)Micro/Nano Sensors in Smart Phone Applications 2023-11-23(四) |
| 第 12 週 | (Hand-On Experiment 5)Fabrication & Testing of Micro/Nano Sensors part 1 2023-11-30(四) |
| 第 13 週 | {Lecture} Micro/Nano Sensors 2023-12-07(四) |
| 第 14 週 | (Hand-On Experiment 5)Fabrication & Testing of Micro/Nano Sensors part 2 2023-12-14(四) |
| 第 15 週 | {Lecture} Micro/Nano Actuators 2023-12-21(四) |
| 第 16 週 | (Hand-On Experiment 6)Fabrication & Testing of Micro/Nano Actuator 2023-12-28(四) |
| 第 17 週 | Exam 2 2024-01-04(四) |
| 第 18 週 | 彈性補充教學 2024-01-11(四) |
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nctu.edu.tw