半導體製程技術概論(一)
Introduction to Semiconductor Manufacturing Technology (I)
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 半導體製程技術概論(一) SB522（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
Silicon integrated circuit fabrication technology requires many diverse fields of science and engineering. This course will teach the key fabrication technologies and the scientific foundations that carried microelectronics well into nanotechnology.
Knowledge of semiconductor device physics, solid state physics and principles of electrical engineering, modern physics
無備註
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midterm exam 50% final exam 50%
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Crystal Growth and Wafer Engineering Introduction 2024-02-19(一) |
| 第 2 週 | Crystal Growth and Wafer Engineering Introduction 2024-02-26(一) |
| 第 3 週 | Crystal Growth and Wafer Engineering Introduction 2024-03-04(一) |
| 第 4 週 | Emergence of Silicon Valley/ Moore’s Law 2024-03-11(一) |
| 第 5 週 | Emergence of Silicon Valley/ Moore’s Law 2024-03-18(一) |
| 第 6 週 | Invention of the Transistor 2024-03-25(一) |
| 第 7 週 | 2024-04-01(一) |
| 第 8 週 | Lithography and Pattern Transfer 2024-04-08(一) |
| 第 9 週 | Lithography and Pattern Transfer 2024-04-15(一) |
| 第 10 週 | Modern CMOS Technology 2024-04-22(一) |
| 第 11 週 | Semiconductor Manufacturing, Gettering and Wafer Cleaning 2024-04-29(一) |
| 第 12 週 | Thermal Oxidation and the Si/ SiO2 2024-05-06(一) |
| 第 13 週 | InterfaceRapid Thermal Processing 2024-05-13(一) |
| 第 14 週 | Thin Film Deposition and Epitaxy 2024-05-20(一) |
| 第 15 週 | Etching 2024-05-27(一) |
| 第 16 週 | Statistical Process Control and Process Monitoring in Semiconductor Fabrication 2024-06-03(一) |
ppt files and handout
- 地點
- B430
- 時間
- every Wednesday and Thursday 2-4 PM
- 聯絡方式
- x56581