論文研討-電波組
Graduate Seminar
| 節 | 週三 |
|---|---|
5 13:20–14:10 | 論文研討-電波組 EDB26（光復） 2 節連堂 |
6 14:20–15:10 |
* 根據陽明交大上課時間表所列
Micro-electro-mechanical systems (MEMS) technology is used to create systems that combine electronic and mechanical component elements such as actuators and sensors into a single chip, with microstructures such as tiny pillars and membranes as well as electric circuits. Using microfabrication (micromachining), an advanced fabrication technology for semiconductor integrated circuits, moving parts and 3D objects such as gears with dimensions of several tens of micrometers are fabricated on a thin substrate (wafer) such as silicon or glass. Because MEMS can produce many products on a wafer at once, it is better suited for mass production than the method of making and combining individual electronic and mechanical parts. MEMS will enable smaller and more lightweight designs, and it is also expected to lead to lower power consumption. One everyday device that uses MEMS is the smartphone. Several MEMS products, including accelerometers, gyro sensors, and microphones, are installed in the smartphone, contributing greatly to the miniaturization, higher performance, and high functionality of the component digital devices. This course will introduce the principle of these MEMS which is needed for research and development for application of IT, Communications, and Automotive.
General Physics
無備註
Lectures will be given by using PPTX Projections
Basic point: 80% (Attendence:50, Final report:50) Point Addition:20% (Homework: A4 2 pages Report)
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| 週次 | 主題 |
|---|---|
| 第 1 週 | Course Overview 2024-09-04(三) |
| 第 2 週 | Introduction 2024-09-11(三) |
| 第 3 週 | Micromachining 1 2024-09-18(三) |
| 第 4 週 | Micromachining 2 2024-09-25(三) |
| 第 5 週 | Microactuators 2024-10-02(三) |
| 第 6 週 | Piezoelectric thin film processes and applications 2024-10-09(三) |
| 第 7 週 | Integrated MEMS Technology 2024-10-16(三) |
| 第 8 週 | Mid-term Report 2024-10-23(三) |
| 第 9 週 | IT, communications, and automotive applications 2024-10-30(三) |
| 第 10 週 | New Topics in MEMS 2024-11-06(三) |
| 第 11 週 | Accelerometer, gyroscope, magnetic sensor 2024-11-13(三) |
| 第 12 週 | Metamaterials for 6G and robotics applications 2024-11-20(三) |
| 第 13 週 | Application of MEMS technology to quantum beam optical elements and its use at the 3 GeV high-brightness synchrotron radiation facility NanoTerasu 2024-11-27(三) |
| 第 14 週 | Manufacturing inspection, environmental sensors, nanomachining, power generation devices 2024-12-04(三) |
| 第 15 週 | Medical and Healthcare Applications 2024-12-11(三) |
| 第 16 週 | Final Report 2024-12-18(三) |
Selected Papers and Lecture Notes will be Available
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