綠能奈米科技
Green Nanotechnology
| 節 | 週三 |
|---|---|
7 15:30–16:20 | 綠能奈米科技 EDB01（光復） 3 節連堂 |
8 16:30–17:20 | |
9 17:30–18:20 |
* 根據陽明交大上課時間表所列
Green nanotechnology has two goals: producing nanomaterials and products without harming the environment or human health, and producing nanoproducts that provide solutions to environmental problems. It uses existing principles of green chemistry and green engineering to make nanomaterials and nanoproducts without toxic ingredients, at low temperatures using less energy and renewable inputs wherever possible, and using lifecycle thinking in all design and engineering stages. To produce higher performance and lower energy consumption of advanced green nano-devices, a process technology with atomic-layer-level control of device materials and structure is inevitable. Process technologies (such as etching, thin film deposition, surface modification) are basis of Nano-/Bio-technology and are realized by utilization and control of plasma, beam, bio-molecules, and so on. This course will introduce the principle of these nano-processes which is needed for research and development of green nano-devices. Examples of devices fabricated by these processes are also introduced.
General Physics 普物
無備註
Lectures will be given by using PPTX Projections
Basic point: 80% (Attendence:32, Mid-Term Report:24, Final Exam:24) Point Addition:20% (Homework: Report of one slide + Presentation)
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Course Overview (1 lecture) 2024-09-04(三) |
| 第 2 週 | Semiconductor Device Fabrication Processes 2024-09-11(三) |
| 第 3 週 | Plasma Discharge and its Process Application for Semiconductor Device Fabrication 2024-09-18(三) |
| 第 4 週 | Plasma Discharge and its Process Application for Semiconductor Device Fabrication 2024-09-25(三) |
| 第 5 週 | Plasma Discharge and its Process Application for Semiconductor Device Fabrication 2024-10-02(三) |
| 第 6 週 | Damages of Plasma Irradiation and its Solution for Nanodevices 2024-10-09(三) |
| 第 7 週 | Damages of Plasma Irradiation and its Solution for Nanodevices 2024-10-16(三) |
| 第 8 週 | Damages of Plasma Irradiation and its Solution for Nanodevices 2024-10-23(三) |
| 第 9 週 | Atomic Layer Processes for Nano- and Atomic Devices 2024-10-30(三) |
| 第 10 週 | Atomic Layer Processes for Nano- and Atomic Devices 2024-11-06(三) |
| 第 11 週 | Midterm Report 2024-11-13(三) |
| 第 12 週 | Advanced ULSI, TFT, High Frequency and Power Devices 2024-11-20(三) |
| 第 13 週 | Advanced ULSI, TFT, High Frequency and Power Devices 2024-11-27(三) |
| 第 14 週 | Bio-nanoprocess and MEMS/NEMS sensors 2024-12-04(三) |
| 第 15 週 | Quantum Dots Devices 2024-12-11(三) |
| 第 16 週 | Nanomaterials for Energy 2024-12-18(三) |
| 第 17 週 | Final Report 2024-12-25(三) |
Selected Papers and Lecture Notes will be Available
- 地點
- ES812
- 時間
- 3EF
- 聯絡方式
- By Email