微電子積體電路製程
VLSI Manufacture Technology
| 節 | 週三 |
|---|---|
6 14:20–15:10 | 微電子積體電路製程 3 節連堂 |
7 15:30–16:20 | |
8 16:30–17:20 |
* 根據陽明交大上課時間表所列
This course provides a fundamental insight into the manufacturing technology of semiconductor devices and integrated circuits.
basics of fundamental physics, chemistry, and mathematics
無備註
Textbooks is downloadable via sources. Handouts will be given in the beginning of the semester.
Assignments and presentation: 30% Midterm exam (open book) 30% Final exam (open book) 40% *All assignments and exams are carried out online.
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| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction 2025-02-19(三) |
| 第 2 週 | Semiconductor Basics 2025-02-26(三) |
| 第 3 週 | SOI Materials and Devices 2025-03-05(三) |
| 第 4 週 | Epitaxy and Substrates 2025-03-12(三) |
| 第 5 週 | Thermal Process 2025-03-19(三) |
| 第 6 週 | Photolithography: Photomask fabrication, photoresist 2025-03-26(三) |
| 第 7 週 | Plasma Basics-Physical Vapor Deposition 2025-04-02(三) |
| 第 8 週 | Midterm Exam 2025-04-09(三) |
| 第 9 週 | Dopand Diffusion, Etching 2025-04-16(三) |
| 第 10 週 | Integrated-Circuit Packaging 2025-04-23(三) |
| 第 11 週 | Chemical Vapor Deposition and Low-K Dielectrics 2025-04-30(三) |
| 第 12 週 | Atomic Layer Deposition 2025-05-07(三) |
| 第 13 週 | Electrical, Physical and Chemical Characterization 2025-05-14(三) |
| 第 14 週 | Failure Analysis 2025-05-21(三) |
| 第 15 週 | Integrated Circuit Processing Technologies 2025-05-28(三) |
| 第 16 週 | Final Exam 2025-06-04(三) |
| 第 17 週 | 2025-06-11(三) |
1. Introduction to Semiconductor Manufacturing Technology (2nd Edition) (Xiao, Hong, SPIE, 2012) 2. Handbook of Semiconductor Manufacturing Technology,Robert Doering, Yoshio Nishi, (CRC press, 2008) 3. Semiconductor Devices Physics and Technology, S.M. Sze (2nd Edition) (John wiley & SONS, INC, 2002)
- 地點
- online
- 時間
- 教師未提供此項資料
- 聯絡方式
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