微奈米工程導論
Introduction to Micro/Nanotechnology
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 微奈米工程導論 EE324（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
主要學習微奈米級的製程與量測技術, 課堂會發給每一位學生一片矽晶圓, 透過邊學習各式微奈米製程原理並邊執行連續製程實作(共5次實作), 最終做出晶片上各種關鍵微奈米結構與簡易元件, 實踐做中學的目標, 最後再學習各式最新之微奈米級物理感測器與致動器(學習更多應用所需之不同元件的不同製程整合方式, 並進行比較之學習). Major Part of the Course: Learn Micro/Nanoscale Fabrication and Characterization, Including corresponding hand-on experiments. Other part of the Course: Learn Micro/Nanoscale Sensors and Actuators (Learn Integration of Different Fabrication-Processes for Devices).
普通物理 College Physics
無備註
Teaching Assistant (TA): Major TA: 古東錡, Ext 55194, dongqigu.en13@nycu.edu.tw Major TA: 葉沛哲, Ext. 55194, pe0963906196.en13@nycu.edu.tw
50 points- 5 Hand-On Experiments 25 points- 1st Exam 20 points- 2nd Exam 5 points- Class Attendance
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Introduction 2025-09-01(一) 時數：[2025-09-01]鍾添淦(3.00) |
| 第 2 週 | {Lecture} Micro Fabrication: Basics of Silicon Wafer and Silicon Processing 2025-09-08(一) 時數：[2025-09-08]鍾添淦(3.00) |
| 第 3 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask) 2025-09-15(一) 時數：[2025-09-15]鍾添淦(3.00) |
| 第 4 週 | {Lecture} Micro Fabrication: Photo-Lithography, CAD/Layout (for Photo Mask) (Hand-On Experiment 1) Micro/Nano-Fabrication and Characterization 2025-09-22(一) 時數：[2025-09-22]鍾添淦(3.00) |
| 第 5 週 | {Lecture} Micro Fabrication: Wet Etching 2025-09-29(一) 時數：[2025-09-29]鍾添淦(3.00) |
| 第 6 週 | {Lecture} Micro Fabrication: Film Deposition, Physical Vapor Deposition (Hand-On Experiment 2) Micro/Nano-Fabrication and Characterization 2025-10-06(一) 時數：[2025-10-06]鍾添淦(3.00) |
| 第 7 週 | {Lecture} Micro Fabrication: Film Deposition, Chemical Vapor Deposition, Dry Etching 2025-10-13(一) 時數：[2025-10-13]鍾添淦(3.00) |
| 第 8 週 | {Lecture} Micro Fabrication: Electroplating (Hand-On Experiment 3) Micro/Nano-Fabrication and Characterization 2025-10-20(一) 時數：[2025-10-20]鍾添淦(3.00) |
| 第 9 週 | {Lecture} Micro Fabrication: Lift-Off Process, etc. Micro Characterization: Optical Microscope, Profilo-meter, Scanning Electron Microscope (Hand-On Experiment 4) Micro/Nano-Fabrication and Characterization 2025-10-27(一) 時數：[2025-10-27]鍾添淦(3.00) |
| 第 10 週 | Review of Micro Fabrication and Characterization 2025-11-03(一) 時數：[2025-11-03]鍾添淦(3.00) |
| 第 11 週 | 1st Exam 2025-11-10(一) 時數：[2025-11-10]鍾添淦(3.00) |
| 第 12 週 | {Lecture} Nano Fabrication: E-Beam Lithography 2025-11-17(一) 時數：[2025-11-17]鍾添淦(3.00) |
| 第 13 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography 2025-11-24(一) 時數：[2025-11-24]鍾添淦(3.00) |
| 第 14 週 | {Lecture} Nano Fabrication: E-Beam Lithography, Imprinting Lithography Nano Characterization: Scanning Electron Microscope, Scanning Probe Microscope. (Hand-On Experiment 5) Nano Fabrication and Characterization 2025-12-01(一) 時數：[2025-12-01]鍾添淦(3.00) |
| 第 15 週 | (Lecture) Classical and New Micro/Nano Sensors and/or Actuators in Smart Phone and Wearable Devices Applications Review of Nano Fabrication and Characterization 2025-12-08(一) 時數：[2025-12-08]鍾添淦(3.00) |
| 第 16 週 | 2nd Exam 2025-12-15(一) 時數：[2025-12-15]鍾添淦(3.00) |
Lecture Notes, Lab Notes, Electronic Resources/Textbooks
- 地點
- Class room or EE422
- 時間
- Right after each class: 1 hour
- 聯絡方式
- Ext. 55116 mail: tkchung@nycu.edu.tw