半導體製程技術概論(一)
Introduction to Semiconductor Manufacturing Technology (I)
| 節 | 週一 |
|---|---|
5 13:20–14:10 | 半導體製程技術概論(一) SB321（光復） 3 節連堂 |
6 14:20–15:10 | |
7 15:30–16:20 |
* 根據陽明交大上課時間表所列
Silicon integrated circuit fabrication technology requires many diverse fields of science and engineering. This course will teach the key fabrication technologies and the scientific foundations that carried microelectronics well into nanotechnology.
Knowledge of semiconductor device physics, solid state physics and principles of electrical engineering, modern physics
無備註
教師未提供此項資料
midterm exam 50% final exam 50%
教師未提供此項資料
| 週次 | 主題 |
|---|---|
| 第 1 週 | Crystal Growth and Wafer Engineering Introduction 2026-02-23(一) |
| 第 2 週 | Crystal Growth and Wafer Engineering Introduction 2026-03-02(一) |
| 第 3 週 | Crystal Growth and Wafer Engineering Introduction 2026-03-09(一) |
| 第 4 週 | Emergence of Silicon Valley/ Moore’s Law 2026-03-16(一) |
| 第 5 週 | Emergence of Silicon Valley/ Moore’s Law 2026-03-23(一) |
| 第 6 週 | Invention of the Transistor 2026-03-30(一) |
| 第 7 週 | 2026-04-06(一) |
| 第 8 週 | Lithography and Pattern Transfer 2026-04-13(一) |
| 第 9 週 | Lithography and Pattern Transfer 2026-04-20(一) |
| 第 10 週 | Modern CMOS Technology 2026-04-27(一) |
| 第 11 週 | Semiconductor Manufacturing, Gettering and Wafer Cleaning 2026-05-04(一) |
| 第 12 週 | Thermal Oxidation and the Si/ SiO2 2026-05-11(一) |
| 第 13 週 | InterfaceRapid Thermal Processing 2026-05-18(一) |
| 第 14 週 | Thin Film Deposition and Epitaxy 2026-05-25(一) |
| 第 15 週 | Etching 2026-06-01(一) |
| 第 16 週 | Statistical Process Control and Process Monitoring in Semiconductor Fabrication 2026-06-08(一) |
ppt files and handout
- 地點
- B430
- 時間
- every Wednesday and Thursday 2-4 PM
- 聯絡方式
- x56581